Photomask Automatic Storage Cell
BS3002-1

Intelligent Micro-Environment Storage Solution for Semiconductor Photomasks

In semiconductor manufacturing, photomasks are critical assets that require strict environmental control and contamination protection. The Bossmen Photomask Automatic Storage Cell integrates micro-environment control technology with automated storage and management systems to ensure photomasks are stored in a clean, stable, and traceable environment. By combining precise humidity control, independent nitrogen management, and intelligent RFID tracking, the system significantly reduces contamination risks and human handling errors while improving operational efficiency and process reliability.

Precise Control, Intelligent Management

The system is designed to maintain a stable storage micro-environment for each Mask Pod through precise humidity control and independent nitrogen flow management. Combined with RFID identification and automated handling systems, it enables accurate storage, retrieval, and inventory tracking while providing real-time monitoring and alarm functions to ensure photomask safety and quality.

Key Features:

• Micro-environment control technology maintains a clean and stable storage environment for photomasks.
• Independent nitrogen supply and flow control for each Mask Pod to optimize preservation conditions.
• Intelligent RFID system enables real-time tracking, inventory monitoring, and access records.
• Automated robotic handling system ensures precise photomask storage and retrieval.
• Real-time monitoring of environmental parameters, storage status, and system operation.
• Automatic alarm notifications when abnormal conditions are detected.
• Reduces contamination risk and minimizes manual handling errors.
• Improves storage efficiency and enhances semiconductor process reliability.